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Coriolis Mass Flow Controller
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Coriolis Mass Flow Controller

Coriolis Mass Flow Controller

The Coriolis Mass Flow Controller measures mass flow directly and maintains stable control under density, temperature, and pressure variations within specified operating conditions.

Product Overview

 

The Coriolis Mass Flow Controller measures mass flow directly and maintains stable control under density, temperature, and pressure variations within specified operating conditions.

 

Technical Specifications

 

Category

Parameter

Specification

Flow Performance

Liquid Mass Flow Range

0.1 – 20.0 kg/h

Gas Mass Flow Range

2.0 – 500.0 ln/min

Flow Accuracy (Liquid)

±0.2% of reading

Flow Accuracy (Gas)

±0.5% of reading

Repeatability

±0.05% of reading

Zero Stability

±0.005 kg/h

Turndown Ratio

100:1

Response Time

< 1.5 s

Density Accuracy (Optional)

±0.005 g/cm³

Operating Conditions

Maximum Pressure

10 MPa (100 bar)

Pressure Drop

< 0.1 MPa under flow conditions

Fluid Temperature Range

-20°C to +70°C

Ambient Temperature

0°C to +50°C

Media Compatibility

Liquid / Gas / Supercritical

Materials

Wetted Materials

SS 316L / Hastelloy C-22

Housing Material

Anodized Aluminum

Protection Rating

IP65

Seal Materials

FKM / FFKM / PTFE

Valve Type

Solenoid / Piezoelectric

Valve State

NC (optional NO)

Process Connection

1/4" Swagelok / VCR

Electrical

Power Supply

24 VDC ±10%

Power Consumption

12 W

Analog Signals

0–5V / 0–10V / 4–20mA

Communication

Modbus RTU / Profinet / EtherCAT

Connector

M12 8-pin / D-Sub 9-pin

 

Compliance & Certifications

 

Standard / Regulation

Compliance Scope

ISO 9001:2015

Certified quality management system for controlled manufacturing and traceability

ISO/IEC 17025

Accredited calibration ensuring traceable flow measurement accuracy

CRN Certification

Registered pressure equipment design for Canadian compliance

NEMA 4X

Industrial enclosure protection against corrosion, dust, and water ingress

SEMI F20

Wetted materials meeting semiconductor-grade purity and surface finish requirements

WEEE Directive

EU-compliant electronic waste recycling and environmental disposal standards

 

Industry Applications

 

Industry / Field

Application

Semiconductor

Precursor gas flow control in chemical vapor deposition processes

Pharmaceutical

Active ingredient dosing in continuous blending systems

Petrochemical

Catalyst and additive injection in high-pressure reaction systems

Food & Beverage

Flavor and additive blending in continuous production lines

Aerospace

Fuel mass flow control in test and simulation systems

Renewable Energy

Hydrogen flow control in fuel cell testing systems

 

Calibration & Quality Control

 

Zero Stability Testing (0.05%)
Long-term drift testing under low-flow conditions within calibration range.


Fluid Accuracy Verification (±0.2%)
Gravimetric reference measurement used for flow accuracy evaluation.


150% Hydrostatic Pressure Proofing
Pressure applied at 1.5× rated level to verify structural margin.


Helium Leak Test (1×10⁻⁹ mbar·L/s)
Helium mass spectrometry used to evaluate sealing performance.


72-Hour Thermal Stress Aging
Thermal cycling under controlled conditions to assess electronic stability.


5-Point Full-Scale Linearization
Multi-point calibration across full range to correct linear response.

 

Technical Support & OEM Capabilities

 

Custom Interface Engineering
Custom flange and tri-clamp connections are available, with a typical 6-week engineering cycle.


Anti-Corrosion Surface Coating
Surface coating options applied for specific chemical resistance and corrosive media.


24-Hour Technical Response
Engineering feedback on hardware and troubleshooting is typically provided within one business day.


Lifecycle Recalibration Services
Periodic factory flow profiling and tuning options available over the complete operational lifespan.

 

Product

 

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FAQ

 

Q: What is the standard lead time for a non-standard flange process connection?

A: Custom flange adaptations typically require a four to six-week engineering and manufacturing cycle before shipment.

Q: Does the factory provide material traceability documentation for regulatory compliance?

A: EN 10204 3.1 material certificates for wetted metal parts are available upon request.

Q: How often does the internal sensor structure require factory recalibration?

A: Annual verification is recommended, though actual intervals depend on fluid abrasiveness and specific process cleanliness standards.

Q: Can the control valve be serviced or replaced independently of the flow sensor?

A: The modular design allows field replacement of the valve actuator assembly without disconnecting the primary sensor tube body.

 

HNF90 Mass Flow Meter

Specific Parameters

Value / Description

Measurement Principle

Based on the Coriolis Effect. When fluid flows through the vibrating measurement tube, a phase difference proportional to the mass flow rate is generated. The sensor detects changes in vibration frequency, phase difference, and amplitude, directly calculates the mass flow rate, and determines the fluid density through synchronous vibration frequency.

Nominal Diameter Range

DN01, DN02, DN03, DN04, DN08, DN15, DN20, DN25, DN32, DN40, DN50, DN65, DN80, DN100, DN150, DN200, DN250

Wetted Parts Material

316L Stainless Steel (default), options include 904L, Titanium, C4 Steel, Hastelloy, Duplex Steel, Tantalum, etc.

Connection Method

Threads (NPT, UNF, G thread, DIN sanitary thread), flanges (HG/T, GB/T, ASME, EN, JIS), sanitary clamps (Tri Clamp), etc.

Maximum Measurement Error

Liquid: ±0.1% ± (zero stability / actual flow) ×100%; Gas: ±0.25% ± (zero stability / actual flow) ×100% (accuracy classes available: 0.15, 0.2, 0.5, 1.0).

Measurement Range

Range ratio up to 100:1 (low-frequency sensors up to 1000:1), specific maximum flow varies by model and size (e.g., DN08 max 55 lb/min, DN250 max 66138 lb/min).

Maximum Process Pressure

Up to 96 MPa (depending on the model and size, for example, the small diameter PU type up to 87.5 MPa, large diameter flange type minimum 4 MPa).

Medium Temperature Range

Standard type: -40°C ~ +85°C; Low Temperature type (L): -200°C ~ +85°C; High Temperature type (G): +85°C ~ +200°C; Ultra High Temperature type (C): +200°C ~ +350°C.

Ambient Temperature Range

-40°C ~ +85°C (transmitter).

Transmitter Housing Material

Aluminum or Stainless Steel.

Display/Operation

LCD display, supports operation interface in English, Chinese, and Russian, easy parameter setting.

Inputs

Supports temperature sensor input (e.g. Pt100) for temperature compensation.

Outputs

Two independently configurable output signals (such as 4-20mA, pulse/frequency) for outputting flow, density, etc.; supports digital communication.

Power Supply

Standard 24 VDC (see electrical connection diagram for details).

Certificate

Explosion-proof certification: Ex d ib IIC T6 Gb (certificate number CQEx22.0774X); protection level: IP67; hygienic type complies with 3-A certification, passed EHEDG test.

Functional Safety

Equipped with powerful circuit self-diagnostic functions, facilitating fault location.

 

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